ALIGNABLE LIFTOFF TRANSFER OF DEVICE ARRAYS VIA A SINGLE POLYMERIC CARRIER MEMBRANE

Authors
CALLAHAN JJ MARTIN KP DRABIK TJ QUIMBY BB FAN C
Citation
Jj. Callahan et al., ALIGNABLE LIFTOFF TRANSFER OF DEVICE ARRAYS VIA A SINGLE POLYMERIC CARRIER MEMBRANE, Electronics Letters, 29(11), 1993, pp. 951-953
Citations number
13
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
29
Issue
11
Year of publication
1993
Pages
951 - 953
Database
ISI
SICI code
0013-5194(1993)29:11<951:ALTODA>2.0.ZU;2-9
Abstract
The Letter reports epitaxial liftoff and direct bonding of GaAs/AlxGa1 -xAs heterostructure device arrays and continuous films, using a singl e transparent polymer membrane to support the material during etch of the sacrificial layer and to manipulate it into position for bonding. Au-Sn eutectic alloy bonding leads to a metallurgical bond in minutes. Photoluminescence and current voltage characteristics show that mater ial quality is not substantially degraded in the transfer process.