ANALYTICAL STUDY OF THE GROWTH OF POLYCRYSTALLINE TITANATE THIN-FILMS

Authors
KLEE M DEVEIRMAN A VANDEWEIJER P MACKENS U VANHAL H
Citation
M. Klee et al., ANALYTICAL STUDY OF THE GROWTH OF POLYCRYSTALLINE TITANATE THIN-FILMS, Philips journal of research, 47(3-5), 1993, pp. 263-285
Citations number
23
Categorie Soggetti
Engineering
Journal title
Philips journal of research → ACNP
ISSN journal
01655817
Volume
47
Issue
3-5
Year of publication
1993
Pages
263 - 285
Database
ISI
SICI code
0165-5817(1993)47:3-5<263:ASOTGO>2.0.ZU;2-T
Abstract
Analytical methods such as X-ray diffraction, X-ray fluorescence, indu ctively coupled plasma emission spectroscopy, scanning electron micros copy and transmission electron microscopy are essential for the invest igation of the growth of thin films. The chemical and structural data obtained for titanate thin films are the basis for the discussion of t he electrical properties of thin films and the development of processe s for the fabrication of films for microelectronic applications.