QUANTITATIVE CHARACTERIZATION OF EPITAXIAL SUPERLATTICES BY X-RAY-DIFFRACTION AND HIGH-RESOLUTION ELECTRON-MICROSCOPY

Authors
FULLERTON EE CAO W THOMAS G SCHULLER IK CAREY MJ BERKOWITZ AE
Citation
Ee. Fullerton et al., QUANTITATIVE CHARACTERIZATION OF EPITAXIAL SUPERLATTICES BY X-RAY-DIFFRACTION AND HIGH-RESOLUTION ELECTRON-MICROSCOPY, Applied physics letters, 63(4), 1993, pp. 482-484
Citations number
16
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
63
Issue
4
Year of publication
1993
Pages
482 - 484
Database
ISI
SICI code
0003-6951(1993)63:4<482:QCOESB>2.0.ZU;2-J
Abstract
Quantitative x-ray diffraction (XRD) and high resolution electron micr oscopy (HREM) have been applied to the analysis of an epitaxial CoO/Ni O superlattice. This example shows that the qualitative information de termined directly from a XRD spectrum or HREM image is limited and can even be misleading. However, by a combination of quantitative intensi ty measurements and structural modeling, a detailed quantitative chara cterization of the superlattice structure is