PROTOTYPE OF A MICROTESTING SYSTEM MADE BY THE LIGA PROCESS TO MEASURE THE YOUNGS MODULUS IN CANTILEVER MICROBEAMS

A microtesting system manufactured by the LIGA process (Becker et al., 1986) combined with a new sacrificial structure technique is presente d. The system is used for bending experiments to determine the Young's modulus of electroplated materials used in the LIGA process. The forc e needed to bend the specimen is generated by a pneumatically driven m icroactuator. This actuator is able to produce forces in the range of several 10 mN and displacements of 50 mu m and more. Bending of the sp ecimen is detected optically. With a trap for adhesive, adhesive bondi ng can be applied to cover the actuator chamber with a glass platelet. For the fluidic supply of the actuator, hoses are bonded into microtu nnels (140 mu m diameter) running parallel to the substrate and passin g through the sidewalls of the actuator housing. The microtunnels are produced by the sacrificial structure technique.