N. Galbiati et al., PHOTOLUMINESCENCE INVESTIGATION OF SI AS P-TYPE DOPANT IN ALGAAS GROWN BY MOLECULAR-BEAM EPITAXY ON HIGH-INDEX PLANES, Semiconductor science and technology, 11(12), 1996, pp. 1830-1837
A systematic study of AlGaAs doped with Si in a wide doping range and
grown on (N11)A GaAs surfaces (N less than or equal to 3) by molecular
beam epitaxy is reported, The growth conditions have been kept the sa
me for all the surface orientations. Both electrical and photoluminesc
ence measurements have been carried out to investigate the Si incorpor
ation. Ail the samples display a p-type conductivity indicating that S
i incorporates predominantly on the As sites. A lower C incorporation
on the (111)A surfaces than on (211)A and (311)A has been found. We ob
served that the (111)A planes have a lower optical and morphological q
uality. However, the values of the Hall mobility, of the free carrier
concentration and of the photoluminescence efficiency are not degraded
. The samples grown on the (311)A planes show a higher optical quality
with shallow-impurity-related optical transitions, while in the sampl
es grown on the (211)A planes both crystalline defects and shallow imp
urities are found. The results are explained in terms of the substrate
orientation dependence of the ratio of single to double dangling bond
s.