Md. Strikovsky et al., CROSSED FLUXES TECHNIQUE FOR PULSED-LASER DEPOSITION OF SMOOTH YBA2CU3O7-X FILMS AND MULTILAYERS, Applied physics letters, 63(8), 1993, pp. 1146-1148
A system with two interacting plasma fluxes for the deposition of high
-temperature superconductor films is presented. This system prevents t
he appearance of particles on a film surface, and permits one to obtai
n YBa2Cu3O7-x films with the surface defect concentration as low as 10
(4) cm-2, a high critical temperature of 90 K, and a critical current
density of 4X10(6) A/cm2 at 77 K. It is shown that high morphological
quality films are obtained at a specific target-substrate distance.