DIELECTRIC PLANARIZATION WITH SPIN-ON GLASS-FILMS - CHARACTERIZATION AND APPLICATION

Spin-on glass (SOG) materials were prepared from the acid catalyzed hy drolysis-condensation reaction of tetraethylorthosilicate and methyltz iethoxy-silane in organic solvents. Siloxane products of different mol ecular weight, molecular weight distribution, and molecular structure were obtained by adjusting reaction conditions. Various factors such a s water content, pH, and reaction time were found to play an important role in controlling the molecular parameters of the reaction products . Properties of these materials were characterized for the spin coated SOG films on both bare and patterned wafers. Effect of the baking tem perature and/or molecular parameters were studied in terms of the refr active index, thickness, film shrinkage, stress, crack generation, etc . Control of the molecular weight and hence its distribution and the c hemical structure was found to be very important in the preparation of the SOG materials as a good planarization layer.