An analysis of the sensitivity of coordinate meters for ultimate preci
sion mechanical experiments is presented. It is shown that the existin
g sensitivity of coordinate meters DELTAL(f) congruent-to 10(-16)-10(-
18) cm/ square-root Hz can be substantially improved and reach DELTAL(
f) congruent-to 10(-21)-10(-23) cm/square-root Hz using new types of m
icrowave and optical parametric transducers based on high-Q dielectric
resonators.