OPTICAL-PROPERTIES OF AMORPHOUS-MICROCRYSTALLINE MIXED-PHASE SIH FILMS

Amorphous-microcrystalline mixed-phase hydrogenated silicon (muc-Si:H) films have been prepared at a substrate temperature of 100-degrees-C by glow discharge decomposition of mixed SiH4/H-2 gas. We present the results of optical properties of these films as a function of silane f raction, i.e., optical gap energy, the characteristic energy represent ing the slope of the exponential tail of optical absorption coefficien t and the refractive index in the infrared region and photoluminescenc e properties characterized by photoluminescence peak energy and the va lue of the full width at half maximum in photoluminescence spectra. It is also suggested from the light-induced effects in a-Si:H and muc-Si :H that those effects in photoluminescence is intimately associated wi th amorphous network.