R. Kato et al., THERMAL-DIFFUSIVITY MEASUREMENT OF A THIN-FILM IN THE DIRECTION ACROSS THE FILM BY AC CALORIMETRIC METHOD, JPN J A P 1, 32(8), 1993, pp. 3653-3655
A method utilizing ac calorimetry for measuring thermal diffusivity of
a thin film in the direction across the film is proposed based on bot
h theoretical analysis and experimental examination. The sample system
is composed of three parts: a medium, a thin film sample and a second
medium. For precise measurement, it is essential that one of the two
media is made of the same material as the thin film sample. With this
system, a thin polyimide film with thickness of 75 mum was experimenta
lly examined in the frequency range from 4 to 140 Hz at room temperatu
re. The standard deviation of the analyzed thermal diffusivity was les
s than 0.2%. The value of the thermal diffusivity is consistent with t
hat obtained with a laser flash method.