A DEVICE FOR PHOTOREMOVAL OF ADSORBED HYDROCARBONS FROM POLISHED SURFACES

Authors
PUKHOV AM
Citation
Am. Pukhov, A DEVICE FOR PHOTOREMOVAL OF ADSORBED HYDROCARBONS FROM POLISHED SURFACES, Soviet journal of optical technology, 60(6), 1993, pp. 423-424
Citations number
NO
Categorie Soggetti
Optics
Journal title
Soviet journal of optical technology → ACNP
ISSN journal
00385514
Volume
60
Issue
6
Year of publication
1993
Pages
423 - 424
Database
ISI
SICI code
0038-5514(1993)60:6<423:ADFPOA>2.0.ZU;2-V
Abstract
A device for removing adsorbed hydrocarbons from the surface layer of flat polished materials used in optics and microelectronics is describ ed. The source of VUV radiation used in this device is a pulsed argon lamp with a single-crystal magnesium fluoride window. The photoremoval process takes a few minutes to remove hydrocarbons.