EFFECT OF HYDROGEN FLOW-RATE ON THE PROPERTIES OF MAGNETRON-SPUTTEREDHYDROGENATED MICROCRYSTALLINE SILICON

Authors
BANERJEE R SHARMA SN BANDYOPADHYAY AK BATABYAL AK BARUA AK
Citation
R. Banerjee et al., EFFECT OF HYDROGEN FLOW-RATE ON THE PROPERTIES OF MAGNETRON-SPUTTEREDHYDROGENATED MICROCRYSTALLINE SILICON, Journal of materials science letters, 12(16), 1993, pp. 1316-1319
Citations number
12
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
12
Issue
16
Year of publication
1993
Pages
1316 - 1319
Database
ISI
SICI code
0261-8028(1993)12:16<1316:EOHFOT>2.0.ZU;2-#