LONG-TERM STABILITY OF A MO SI MULTILAYER STRUCTURE/

Citation
Tw. Barbee et al., LONG-TERM STABILITY OF A MO SI MULTILAYER STRUCTURE/, Applied optics, 32(25), 1993, pp. 4852-4854
Citations number
6
Categorie Soggetti
Optics
Journal title
ISSN journal
00036935
Volume
32
Issue
25
Year of publication
1993
Pages
4852 - 4854
Database
ISI
SICI code
0003-6935(1993)32:25<4852:LSOAMS>2.0.ZU;2-7
Abstract
The normal-incidence reflectance of a Mo/Si multilayer mirror, with pe ak reflectance near 130 angstrom, was measured over a period of 20 mon ths by using synchrotron radiation. The measured reflectances were unc hanged over this period of time, and this indicates that the material layers and interfaces were stable.