F. Gamiz et al., AN ANALYTICAL EXPRESSION FOR PHONON-LIMITED ELECTRON-MOBILITY IN SILICON-INVERSION LAYERS, Journal of applied physics, 74(5), 1993, pp. 3289-3292
A complete Monte Carlo study of phonon-limited electron mobility in (1
00) silicon-inversion layers has been carried out. It has been determi
ned advantageous to consider more than three energy subbands for elect
ron motion. First-order intervalley scattering has also been shown to
play an important role in ohmic transport. The results of the Monte Ca
rlo simulation can be fitted by a simple analytical expression that co
incides with the phonon-limited mobility for the bulk in the zero tran
sverse-electric-field limit.