RADIAL OPTICAL-EMISSION PROFILES OF RADIO-FREQUENCY GLOW-DISCHARGES

Authors
PENDER J BUIE M VINCENT T HOLLOWAY J ELTA M BRAKE ML
Citation
J. Pender et al., RADIAL OPTICAL-EMISSION PROFILES OF RADIO-FREQUENCY GLOW-DISCHARGES, Journal of applied physics, 74(5), 1993, pp. 3590-3592
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
74
Issue
5
Year of publication
1993
Pages
3590 - 3592
Database
ISI
SICI code
0021-8979(1993)74:5<3590:ROPORG>2.0.ZU;2-6
Abstract
Radial optical emission profiles are determined from Abel inverted emi ssion spectroscopy of a parallel plate radio frequency system known as a GEC Reference Cell. These profiles in general show a nonuniform pla sma, annular in shape. Etching results of silicon wafers also follow t his annular pattern. This effect is explained by numerically computed large radial and axial electric fields near the edge of the electrodes , produced by the presence of the grounded dark shields.