COMPOSITION OF MULTILAYER METALLIZED TRACKS IN INTEGRATED-CIRCUITS

Authors
SEVASTYANOV VS SHCHERBAKOV AY LYAMINA OM KUPRIYANOVA TA FILLIPPOV MN KHARKEVICH SI LOZINSKAYA TM
Citation
Vs. Sevastyanov et al., COMPOSITION OF MULTILAYER METALLIZED TRACKS IN INTEGRATED-CIRCUITS, Journal of analytical chemistry, 48(2), 1993, pp. 241-246
Citations number
5
Categorie Soggetti
Chemistry Analytical
Journal title
Journal of analytical chemistry → ACNP
ISSN journal
10619348
Volume
48
Issue
2
Year of publication
1993
Part
2
Pages
241 - 246
Database
ISI
SICI code
1061-9348(1993)48:2<241:COMMTI>2.0.ZU;2-0