NEAR-FIELD OPTICAL MICROSCOPY IN TRANSMISSION AND REFLECTION MODES INCOMBINATION WITH FORCE MICROSCOPY

Near-field optical microscopy is the optical alternative of the variou s types of scanning probe microscopes. The technique overcomes the cla ssical diffraction limit in conventional optical microscopy. In this p aper the concepts of near-field optics (NFO) are introduced, followed by a short review of current trends in NFO microscopy. Specifically, d evelopments concerning the efficiency and versatility of both aperture and dielectric probe types are discussed. We present our advances in NFO microscopy, using both fibres and integrated silicon nitride (SiN) structures as dielectric probes. The use of an SIN probe as a combine d optical and force sensor is shown to be advantageous, as it provides a feedback mechanism and allows direct comparison between topography and electric effects. Images of technical and biological samples are p resented with a lateral resolution down to 20 nm, depending on the mic roscopical arrangement used.