MODELING THE ELEMENTARY STEPS OF LOW-PRESSURE DIAMOND DEPOSITION

Low-pressure diamond deposition from hydrocarbon/hydrogen ps-phase mix tures was discovered over 20 years ago, but the exact deposition mecha nism remained unknown. Work reported here confirms preferential graphi te erosion to be the rate-controlling step, as had been assumed by som e researchers earlier, and identifies reaction pathways by which the g raphitic constituents of the deposit are preferentially removed. Model systems of C:H a few monolayers thick were used to show that dehydrog enation, erosion, and hydrogenation all play a part.