METHYLZINC OR UM-N,N,N-TRIMETHYLPROPYLENEDIAMINEDITHIOCARBAMATES - PRECURSORS FOR ZINC OR CADMIUM-SULFIDE - THE X-RAY CRYSTAL-STRUCTURE OF HYLCADMIUMTRIMETHYLPROPYLENEDIAMINEDITHIOCARBAMATE BENZENE SOLVATE

Deposition of metal chalcogenides by metal-organic chemical vapor depo sition can be achieved using various systems, including alkyl-metal-di thio or diselenocarbamates. Initial attempts to modify the behavior of such precursors by changing the nature of the carbamato ligand are re ported. Among the results presented are the synthesis and characteriza tion of the two title compounds and the single-crystal X-ray structure of one of them. For both the zinc and cadmium derivatives the films g rown were of a better quality than those grown from the parent compoun ds or from zinc- or cadmium-diethyldithiocarbamate.