Fa. Miranda et al., EFFECT OF SRTIO3 DEPOSITION TEMPERATURE ON THE DIELECTRIC-PROPERTIES OF SRTIO3 YBA2CU3O7-DELTA/LAALO3 STRUCTURES/, Integrated ferroelectrics, 14(1-4), 1997, pp. 173-180
We report on the effect of the deposition temperature of SrTiO3 on the
dielectric properties of SrTiO3/YBa2Cu3O7-delta/LaAlO3 thin film mult
ilayer structures. In these structures, the YBa2Cu3O7-delta (YBCO) fil
ms were deposited at 800 degrees C by laser ablation, followed by the
in-situ deposition of the SrTiO3 (STO) layer at one of the following t
emperatures: 750 degrees C, 650 degrees C, 550 degrees C, 450 degrees
C, 350 degrees C, and 250 degrees C. Gold (Au) films were deposited an
d patterned on top of the STO layer to form planar Au/STO/YBCO capacit
or structures. The electrical response was studied by measuring the di
electric constant (epsilon(r)) and loss tangent (tan delta) of the fer
roelectric film from 300-40 K, at 1.0 MHz, and at electric fields up t
o 100 kV/cm. Our results show 750 degrees C to be a deposition tempera
ture which allows for large variations of epsilon(r) with applied fiel
d, and with limited enhancement of tan delta. Lower deposition tempera
tures cause a reduction of the induced change in epsilon(r) and an inc
rease in tan delta with applied field.