CHARACTERIZATION OF INSULATING BOUNDARY-L AYERS OF BL-CAPACITORS

Authors
UEHARA M TANAHASHI M
Citation
M. Uehara et M. Tanahashi, CHARACTERIZATION OF INSULATING BOUNDARY-L AYERS OF BL-CAPACITORS, Nippon Seramikkusu Kyokai gakujutsu ronbunshi, 101(8), 1993, pp. 867-870
Citations number
1
Categorie Soggetti
Material Science, Ceramics
Journal title
Nippon Seramikkusu Kyokai gakujutsu ronbunshi → ACNP
ISSN journal
09145400
Volume
101
Issue
8
Year of publication
1993
Pages
867 - 870
Database
ISI
SICI code
0914-5400(1993)101:8<867:COIBAO>2.0.ZU;2-S
Abstract
A microstructure of a barrier-layer capacitor with Bi2O3 diffused SrTi O3 has been studied by means of SEM, TEM, and XPS. Samples for SEM obs ervations were prepared by electrolytic etching, which allowed a visua l characterization of insulating boundary layers. They were O2-diffuse d layers wider than Bi-diffused layers, which observed as lattice-diso rder region by TEM. Metal Bi was observed in addition to Bi2O3 by XPS. Barrier-layer model unique in case of Bi2O3 was investigated for oxyg en supplyment from Bi. And we revealed it's propriety using standard f ree energy of metal oxide.