Ra. Metzger et al., CONFINEMENT OF HIGH BE DOPING LEVELS IN ALINAS GAINAS NPN HETEROJUNCTION BIPOLAR-TRANSISTORS BY LOW-TEMPERATURE MOLECULAR-BEAM EPITAXIAL-GROWTH/, Applied physics letters, 63(10), 1993, pp. 1360-1362
A1InAs/GaInAs npn heterojunction bipolar transistors (HBTs) have been
grown over a substrate temperature range of 280-450-degrees-C with Be
base doping levels ranging from 2.0 X 10(19) to 1. 6 X 10(20) cm-3. We
have determined that for a desired base doping level there exists an
optimum growth temperature at which the Be is confined in the base and
at the same time the dc current gain of the HBT is maximized.