PROGRESS AND PROSPECTS FOR GAN AND THE III-V-NITRIDE SEMICONDUCTORS

Citation
S. Strite et al., PROGRESS AND PROSPECTS FOR GAN AND THE III-V-NITRIDE SEMICONDUCTORS, Thin solid films, 231(1-2), 1993, pp. 197-210
Citations number
85
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
ISSN journal
00406090
Volume
231
Issue
1-2
Year of publication
1993
Pages
197 - 210
Database
ISI
SICI code
0040-6090(1993)231:1-2<197:PAPFGA>2.0.ZU;2-2
Abstract
We review recent research results pertaining to GaN, AlN and InN, focu sing on present-day techniques and future prospects. The molecular bea m epitaxy and metal - organic vapor phase epitaxy growth techniques, a s they have been applied to the nitrides, are described. New developme nts in plasma-based sources and substrates are covered. We also discus s the most recent developments towards an eventual GaN-based device te chnology, including the first GaN p-n junction light-emitting diode. O ngoing work, aimed at developing the necessary processing skills for G aN devices, is presented. We conclude by discussing near-term goals an d identifying critical areas in need of future research.