SCALABLE STAGNATION-FLOW REACTORS FOR UNIFORM MATERIALS DEPOSITION - APPLICATION TO COMBUSTION SYNTHESIS OF DIAMOND

Authors
MCCARTY KF MEEKS E KEE RJ LUTZ AE
Citation
Kf. Mccarty et al., SCALABLE STAGNATION-FLOW REACTORS FOR UNIFORM MATERIALS DEPOSITION - APPLICATION TO COMBUSTION SYNTHESIS OF DIAMOND, Applied physics letters, 63(11), 1993, pp. 1498-1500
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
63
Issue
11
Year of publication
1993
Pages
1498 - 1500
Database
ISI
SICI code
0003-6951(1993)63:11<1498:SSRFUM>2.0.ZU;2-P
Abstract
We describe two inherently scaleable geometries for chemical-vapor-dep osition and heat-transfer processes that are based on stagnation flows . The ''coflow'' and ''trumpet-bell'' designs result in radially unifo rm fluxes to surfaces and they optimize the use of reagents. Using a t rumpet-bell burner, we have grown uniform films of diamond from a subs trate-stabilized flat flame of C2H2/H-2/O2.