MECHANICAL TESTING OF POLYSILICON THIN-FILMS WITH THE ISDG

Authors
YUAN B SHARPE WN
Citation
B. Yuan et Wn. Sharpe, MECHANICAL TESTING OF POLYSILICON THIN-FILMS WITH THE ISDG, Experimental techniques, 21(2), 1997, pp. 32-35
Citations number
14
Categorie Soggetti
Engineering, Mechanical",Mechanics,"Materials Science, Characterization & Testing
Journal title
Experimental techniques → ACNP
ISSN journal
07328818
Volume
21
Issue
2
Year of publication
1997
Pages
32 - 35
Database
ISI
SICI code
0732-8818(1997)21:2<32:MTOPTW>2.0.ZU;2-V