For exciting K-Auger transitions of elements with atomic number betwee
n 13 and 26, Mo x-rays (Mo bremsstrahlung + Mo L(alpha, beta) from a h
igh voltage (max. 30 kV) source were used. High-resolution K-Auger spe
ctra were measured by the help of a high luminosity hemispherical elec
tron spectrometer. Spectral intensities obtained using the Mo x-ray so
urce are compared to the respective intensities measured using an Al a
node and source parameters usual for electron spectrometers. The attai
nable gain in Auger yields is between 2 and 15 for most elements inves
tigated and reaches a factor of 20.5 in the case of P KLL. Optimum con
ditions of K-Auger excitation (regarding the atomic number region ment
ioned) are also discussed. As an example for applications, the phospho
rus K-Auger parameter has been determined for GaP, taking an advantage
of the presence of the P Is (Mo Lalpha) photoelectron line in the spe
ctra excited by Mo x-rays. The higher analytical sensitivity, attainab
le by measuring Mo x-ray-induced P KLL Auger electrons compared to the
sensitivity of the conventional XPS (Al Kalpha excited P 2p), is demo
nstrated in the case of a phosphoric compound (corrosion inhibitor) ad
sorbed on a polycrystalline Fe surface.