ALN POWDER SYNTHESIS VIA NITRIDING REACTION OF ALUMINUM SUB-CHLORIDE

In this investigation, aluminum nitride powder was successfully synthe sized by the reaction of ammonia with a mixture of aluminum chloride v apor species (AlClx; x = 1, 2 and 3) in a flow-tube reactor at 1000 an d 1200 K. These aluminum chloride vapor species were produced by react ing chlorine with molten aluminum in the flow-tube reactor at the same temperature as synthetic temperature. The aluminum nitride powders sy nthesized under various ammonia concentrations were characterized for size distribution, mean particle size and particle morphology. Those s ynthesized at the higher temperature had a mean particle size of 0.2 t o 0.4 mum with a narrow size distribution range.