AUGER-SPECTROSCOPY STUDY OF THE MNO2-NB2O5 SYSTEM MODIFIED BY HOT IMPLANTATION OF INDIUM

The chemical composition of the complex oxide system MnO2-Nb2O5 doped with indium oxide is studied using Auger electron spectroscopy (AES). The distribution of the basic elements (manganese, niobium, indium and oxygen) in the MnO2 and Nb2O5 layers and at their interface is invest igated. It is shown that indium was present in the two above-mentioned layers and its maximum concentration was observed at the MnO2/Nb2O5 i nterface. It is established that formation of mixed oxides of variable composition, Mn(x)In(y)O(z), occurred in the MnO2 layer at a depth of 300 to 5000 angstrom. The implantation of indium into the Nb2O5 phase which caused a decrease of the leakage current in this system is dete rmined. It is found that in the absence of indium a transition zone of variable composition, Mn(n)Nb(m)O(q), appeared near the MnO2/Nb2O5 in terface during pyrolysis. A violation of the stoichiometric compositio n of the MnO2 and Nb2O5 layers adjacent to the interface is detected.