Results of etching (110) and (001) planes of YFeO3 crystals are presen
ted and discussed in detail. It is shown that boiling H3PO4 or H3PO4 HNO3 in the ratio of 1:1 is the dislocation etchant of YFeO3 crystals
. It is established that the latter etchant is best suited for both (1
10) and (001) planes insofar as the definition of pit and control over
etching are concerned. The kinetics of etching are investigated by ma
king a quantitative study of the etch rate at different temperatures a
nd at different concentrations of H3PO4. Variations in areal extension
and depth of pits with time in H3PO4 or H3PO4 mixed with HNO3 are inv
estigated. It is shown that the areal and vertical etch rates increase
with increase in temperature on both (110) and (001) planes. Addition
of HNO3 to H3PO4 brings down the minimum temperature required for etc
hing (110) and (001) planes. The velocities of dissolution parallel an
d perpendicular to the surface are measured. The activation energy res
ponsible for the dislocation sites for dissolution parallel and perpen
dicular to (110) and (001) planes are estimated. The Arrhenius factors
for areal (A(A)') and vertical (A(D)) dissolution are A(A)' = 1.44 x
10(9) and 3.99 x 10(7) mum/s, and A(D) = 8.12 x 10(3) and 1.31 x 10(4)
mum/s for (110) and (001) planes, respectively.