ION-MOLECULE REACTIONS IN GEH4 SIH4 SYSTEMS STUDIED BY ION-TRAP MASS-SPECTROMETRY/

Gas phase ion-molecule reactions occurring in GeH4/SiH4 systems under different partial pressures and their mechanisms have been investigate d by ion trap mass spectrometry (ITMS). SiH(n)+ (n = 0-3) and GeH(n)(n = 0-3) are the main ionic species at zero reaction time when the Ge H4: SiH4 ratio is in the range 1:1 to 1:12. Self-condensation sequence s are observed at increasing reaction times. Moreover, formation of io ns containing Ge-Si bonds, such as GeSiH(n)+ (n = 2-5) and GeSi2H(n)(n = 4, 5), occurs by reactions of Si2H(n)+ (n = 2-5) and Si3H(n)+ (n = 4, 5) with GeH4. At longer reaction times, further substitution of s ilicon with germanium in GeSiH(n)+ (n = 2-5) ions has been observed, t o give Ge2H(n)+ (n = 2-5).