X-ray spectroscopy has been widely used for chemical analysis since it
s discovery in 1895. X-ray fluorescence (XRF) has been used for over 6
0 years for identifying the elemental composition in most kinds of sam
ples and in combination with modern semiconductor detector technology
XRF has developed into a versatile, multi-element method. With the hig
h X-ray flux attainable from the synchrotron source, new spectroscopic
techniques have become available, such as extended x-ray absorption f
ine structure (EXAFS) and x-ray absorption near-edge spectroscopy (XAN
ES), for studying the chemical states of the different elements. With
the use of high-intensity x-ray microbeams all of these different anal
ytical methods can be performed on a microscopic level. By scanning th
e microbeam over a sample, the distribution of different elements can
be determined. A description of the basic principles of x-ray microbea
m spectroscopy, and the historical background, is given and comparison
s with other techniques are discussed. Different techniques for focusi
ng of x-rays, detection and image reconstruction are described. Exampl
es of applications and future perspectives are discussed with particul
ar emphasis on capillary optical systems.