Cec. Wood et al., RE-EVAPORATION EFFECTS AND OPTICAL-PROPERTIES OF MOLECULAR-BEAM-EPITAXIAL ALGAAS GAAS/ALGAAS WELLS/, Journal of applied physics, 74(3), 1993, pp. 1697-1699
Elemental materials that condense on surfaces near effusion cells can
be reevaporated toward substrates when heated by radiation from effusi
on furnaces. There they accumulate as unwanted impurities at interface
s and distribute throughout epitaxial films during growth. This effect
is greatly increased when shutters are closed. Re-evaporated aluminum
is shown to degrade minority-carrier properties of Al0.3Ga0.7As/GaAs
double heterostructures. Modified temperature schedules and hardware t
o reduce re-evaporation effects are suggested.