X-RAY DOUBLE AND TRIPLE-CRYSTAL DIFFRACTOMETRY OF MOSAIC STRUCTURE INHETEROEPITAXIAL LAYERS

X-ray diffraction in thin layers containing small randomly placed defe cts is described by means of the kinematical diffraction theory and op tical coherence formalism. The method enables us to calculate both the diffracted intensity and its angular distribution, so that it can be used for simulating double crystal and triple crystal x-ray diffractom etry experiments. The theory has been applied to experimental data obt ained from diffractometry measurements of an epitaxial ZnTe layer with mosaic structure after several steps of chemical thinning. A good agr eement of the theory with experiments has been achieved.