Results of Shubnikov-de Haas (SdH), cyclotron resonance (CR), and Hall
-effect measurements on delta-doped InSb:Si films grown by molecular-b
eam epitaxy on insulating InP substrates are reported. The investigati
on covers samples with sheet densities of Si dopant atoms ranging from
1 x 10(11) to 1 x 10(13) cm-2, temperatures from 4.2 to 300 K, and fi
elds from 0 to 7 T. The SdH oscillations show that the samples contain
electrons of two-dimensional nature, occupying multiple subbands. The
effective masses obtained from the CR data correspond well to the sub
band occupation densities. The Hall measurements as well as the CR exp
eriments also give evidence for the presence of additional electrons,
with the conduction-band-edge mass m = 0.014m0 of bulk InSb, which ex
ist presumably in the bulk of the films.