A scanning electron microscope is employed for the investigation of ch
arging on different cuts of an alpha-SiO2. A method for the determinat
ion of trapped charges is proposed. Charging on different cuts is obse
rved to decrease in the order of z cut, 30-degrees cut, 45-degrees cut
, and 60-degrees cut of the alpha-SiO2. This phenomenon is related to
permittivity, defect density, and stress of the samples. Details of th
e experiments and the method of charge determination are given.