Using the scanning electron microscope we have investigated the physic
al parameters determining the size effect of various dielectric sample
s submitted to a surface electric field. It is shown that the size eff
ect is a function of the static permittivity and of the space charge d
istribution. The results are explained by the consideration of charge
diffusion and polarization relaxation processes resulting from the spa
ce charge formation. A one-dimensional mathematical model has also bee
n used to describe space charge distribution. The findings were consis
tent with the experimental observations.