ION CHANNELING IN TEXTURED POLYCRYSTALLINE DIAMOND FILMS

Authors
SAMLENSKI R FLEMIG G BRENN R WILD C MULLERSEBERT W KOIDL P
Citation
R. Samlenski et al., ION CHANNELING IN TEXTURED POLYCRYSTALLINE DIAMOND FILMS, Journal of applied physics, 74(3), 1993, pp. 2134-2136
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
74
Issue
3
Year of publication
1993
Pages
2134 - 2136
Database
ISI
SICI code
0021-8979(1993)74:3<2134:ICITPD>2.0.ZU;2-7
Abstract
Channeling of H+ and H-2+ ions of energies between 1.0 and 2.0 MeV in 100!-textured polycrystalline diamond films grown by microwave plasma -assisted chemical-vapor deposition has been observed with Rutherford backscattering. The width of the orientational distribution of the dia mond crystallites as deduced from the measured projectile velocity dep endence of the observed channeling angular scans amounted to about 1-d egrees.