Cjl. Moore et J. Hennessy, THE EFFECTS OF PROBE POWER ON THE SPATIAL VARIATION OF THE ROOM-TEMPERATURE PHOTOLUMINESCENCE WAVELENGTH OF AN INGAASP EPITAXIAL STRUCTURE, Materials science & engineering. B, Solid-state materials for advanced technology, 20(1-2), 1993, pp. 190-197
Photoluminescence mapping is widely employed as a non-destructive char
acterization technique for epitaxial device structures, yielding measu
rements that may be correlated with final device performance. In order
to obtain useful correlations, however, a number of experimental fact
ors must be considered. We discuss herein the effect of probe laser po
wer on the results of mapping experiments and demonstrate how increase
d probe power can result in underestimation of both the average proper
ties of an epitaxial layer and its inhomogeneity.