CONTROLLED-DEPTH AND CROSS-SECTION PREPARATION TECHNIQUES FOR TRANSMISSION ELECTRON-MICROSCOPY SUBSURFACE STUDIES IN METALS

Thin film specimen preparation from bulk material at a controlled dept h below the surface and cross-section thin film preparation for transm ission electron microscope investigations of electrically conducting m aterials are described. Both techniques are illustrated by austenitic stainless steel, where they have been used complementary to each other for microstructural studies of subsurface ion irradiation damage. The advantages and limitations of both techniques are discussed.