ROLE OF SPECIES GENERATED FROM PHOSPHORUS SOURCES IN INGAP GROWTH-MECHANISM

Authors
HORI H ISHIKAWA H MASHITA M
Citation
H. Hori et al., ROLE OF SPECIES GENERATED FROM PHOSPHORUS SOURCES IN INGAP GROWTH-MECHANISM, JPN J A P 2, 32(5B), 1993, pp. 120000707-120000709
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS → ACNP
Volume
32
Issue
5B
Year of publication
1993
Pages
120000707 - 120000709
Database
ISI
SICI code
Abstract
Metalorganic chemical vapor deposition of InGaP using phosphine and te rtiarybutylphosphine in various mixture ratios was carried out in orde r to elucidate the growth mechanism. It revealed that the two species generated from the phosphorus source, i.e., PH(x)(x=0-2) radicals and phosphorus molecules (P2 and/or P4), are necessary for epitaxial growt h with high source material efficiency.