DYNAMIC-MODEL OF MICROSCALE ELECTROMECHANICAL SPATIAL LIGHT-MODULATOR

Authors
WETSEL GC STROZEWSKI KJ
Citation
Gc. Wetsel et Kj. Strozewski, DYNAMIC-MODEL OF MICROSCALE ELECTROMECHANICAL SPATIAL LIGHT-MODULATOR, Journal of applied physics, 73(11), 1993, pp. 7120-7124
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
73
Issue
11
Year of publication
1993
Pages
7120 - 7124
Database
ISI
SICI code
0021-8979(1993)73:11<7120:DOMESL>2.0.ZU;2-N
Abstract
A model based on classical physics describing the nonlinear dynamics o f a microscale spatial light modulator has been developed. The coupled electromechanical equations of motion have been solved for steady-sta te, transient, and harmonic excitation. Comparison of theoretical pred ictions with the results of experiment for representative devices show s good agreement for small-amplitude deflections, large-amplitude defl ections, and unstable transitions.