CHARACTERIZATION OF A MICROMECHANICAL SPATIAL LIGHT-MODULATOR

The optical-beam-control dynamics of torsion-beam deformable-mirror-de vice spatial light modulators has been characterized to determine prop erties important to their operation. The responses of individual pictu re elements to steady-state, transient, and harmonic excitation were m easured using optical-beam-deflection sensors. The steady-state angula r deflection is characterized by a stable, reversible regime for appli ed voltages less than a critical value, V(c) (approximately 16 VDC), a n unstable transition to stable maximal deflection at V(c), and hyster esis as the applied voltage is reduced to zero. Representative devices with 50 mum X 50 mum pixels exhibit full-deflection rise times of ten s of microseconds and small-deflection resonant frequencies of the ord er of 10 kHz.