FREESTANDING SILICON MICROSTRUCTURES FABRICATED BY LASER CHEMICAL-PROCESSING

Laser-assisted chemical-vapor deposition (LCVD) is used for growth in ''free space'' of microscale fibers and helical structures of silicon. The LCVD technique is also used for fabrication of a tungsten coil on a cylindrical silicon substrate, i.e., a microsolenoid is realized. T he microstructure of the silicon deposits is investigated by transmiss ion electron microscopy, and their mechanical strength is evaluated by micromechanical testing in situ in a scanning electron microscope. Th e resistivity of the tungsten coil is measured, and the magnetic prope rties of the microsolenoid are investigated by means of superconductin g quantum interference device equipment.