IMAGING-PLATE PLANE-WAVE X-RAY TOPOGRAPHY OF LOCAL LATTICE DISTRIBUTION DUE TO GROWTH STRIATIONS IN SILICON-CRYSTALS

A newly developed imaging-plate plane-wave x-ray topography (IPPWT) me thod has been successfully applied to the quantitative analysis of loc al lattice distortion due to growth striations in magnetic-field-appli ed Czochralski silicon single crystals. IPPWT was found to possess suf ficient spatial resolution to accurately measure variations of growth- induced local lattice distortions (DELTAd/d and DELTAalpha. The advant ageous features of IPPWT, in comparison with conventional photographic -plate plane-wave x-ray topography, are a wide latitude in x-ray expos ure conditions, better x-ray intensity linearity for performing quanti tative analysis, and convenience in image processing and data handling .