Dy2O3 layers have been grown on SrTiO3 by molecular beam epitaxy. X-ra
y and electron diffraction patterns clearly show that Dy2O3 grows epit
axially on SrTiO3 with {100} planes parallel to the substrate surface.
Transmission electron microscopy reveals that the Dy2O3 film breaks u
p into small domains (10-40 nm). This leads to the formation of terrac
es which limits the structural perfection of thin overgrown DyBa2Cu3O7
by introducing steps and small misorientations (within 3-degrees). Th
e resulting surface corrugation does not preclude the growth of epitax
ial c-axis DyBa2Cu3O7 films with a T(c0) of 86 K. Crystallographic ana
lysis and image calculations show that the domain growth of Dy2O3 is a
ssociated with the formation of 90-degrees rotation twins.