STUDY OF THE EPITAXY OF BETA-FESI2 BY CODEPOSITION OF FE AND SI ON SI(111)

Authors
WALLART X NYS JP DEHAESE O VINCENT G
Citation
X. Wallart et al., STUDY OF THE EPITAXY OF BETA-FESI2 BY CODEPOSITION OF FE AND SI ON SI(111), Applied surface science, 70-1, 1993, pp. 598-602
Citations number
15
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
70-1
Year of publication
1993
Part
B
Pages
598 - 602
Database
ISI
SICI code
0169-4332(1993)70-1:<598:SOTEOB>2.0.ZU;2-T
Abstract
In this work, we investigate the epitaxy of beta-FeSi2 on Si(111) usin g an Fe and Si codeposition method. We show that, in order to grow FeS i2 in its beta phase, a template is needed. The resulting films exhibi t a better cristallography and morphology than those grown by the soli d phase epitaxy (SPE) method.