INVESTIGATION ON ELECTRONIC DENSITY-OF-STATES IN A-SIXC1-X-H FILMS

Films of a-SixC1-x:H with different carbon contents were deposited by an ultrahigh vacuum plasma enhanced chemical vapour desposition system and characterized by means of the following experimental techniques: photothermal deflection spectroscopy, constant photocurrent method, op tical modulation spectroscopy and electron spin resonance. The results include data on optical gap, Urbach tail energy, thermal activation e nergy of dark conductivity, density and distribution of defects and qu antum efficiency-mobility-lifetime product. Comparison of the data obt ained with the different techniques is presented and discussed.