CALIBRATION OF AN ELECTRON BACKSCATTERING PATTERN SET-UP

The determination of lattice orientations from electron back-scatterin g patterns (EBSPs) in a scanning electron microscope (SEM) requires ac curate knowledge of the position of the pattern centre and the source point to screen distance. This paper outlines a new procedure that ena bles the determination of these parameters for any given set-up of the EBSP/SEM system. The calibration procedure simply requires the positi ons and indices of at least four poles in a pattern obtained from an a rbitrary specimen, and eliminates the need for standard specimens or s pecial attachments to the EBSP/SEM system. The pattern centre is shown to be located with a precision of approximately 0.5-degrees and the s ource point to screen distance can be determined with a relative preci sion of approximately 0.5%.