ENERGY-LOSSES OF 12-32 KEV H-CRYSTALS(, HE+ AND N+ IONS AT GLANCING ANGLE SCATTERING FROM CLEAN SURFACES OF SILICON)

Authors
NARUMI K FUJII Y KISHINE K FUJIWARA S KIMURA K MANNAMI M
Citation
K. Narumi et al., ENERGY-LOSSES OF 12-32 KEV H-CRYSTALS(, HE+ AND N+ IONS AT GLANCING ANGLE SCATTERING FROM CLEAN SURFACES OF SILICON), Journal of the Physical Society of Japan, 62(5), 1993, pp. 1603-1611
Citations number
20
Categorie Soggetti
Physics
Journal title
Journal of the Physical Society of Japan → ACNP
ISSN journal
00319015
Volume
62
Issue
5
Year of publication
1993
Pages
1603 - 1611
Database
ISI
SICI code
0031-9015(1993)62:5<1603:EO1KHH>2.0.ZU;2-S
Abstract
The energy spectra of scattered ions of 12-32 keV H+, He+ and N+ have been measured at glancing angle incidence on the clean (001) and (111) surfaces of Si. A similar formula of the position-dependent stopping power which has been derived for high energy light ions was used to an alyze the present results of low energy ions.