XUV OPTICS CHARACTERIZATION AT THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Authors
WATTS RN TARRIO C LUCATORTO TB MADDEN RP DESLATTES RD CATICHA A ESTLER WT EVANS CJ MCWAID T FU J VORBURGER TV
Citation
Rn. Watts et al., XUV OPTICS CHARACTERIZATION AT THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 79(1-4), 1993, pp. 244-246
Citations number
8
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
79
Issue
1-4
Year of publication
1993
Pages
244 - 246
Database
ISI
SICI code
0168-583X(1993)79:1-4<244:XOCATN>2.0.ZU;2-X
Abstract
The National Institute of Standards and Technology (NIST) is establish ing a complete measurement program for the characterization of extreme ultraviolet (XUV) multilayer optics. In this paper we describe our ex isting and proposed efforts in surface figure and surface finish metro logy, X-ray diffraction, and XUV reflectometry.